Nitridation of GaAs Surface by Low Energy Ion Implantation with In Situ Control of Chemical Composition
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LOW-ENERGY-ION ENHANCED DIFFUSION AT THE SURFACE OF METALS
Radiation enhanced diffusion at the surface of metals has been observed and studied for low-energy nitrogen ions at the surface of copper. The displacement of the target atoms during irradiation creates vacancies and other defects near the surface, thus enhancing the diffusion of implanted materials toward the surface and also into the solid. The mechanism has been studied here by a specia...
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